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| Model Number: PSMDS30 |
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Product Details: The CoberMuegge PSMDS30 downstream source provides a compact, efficient and reliable plasma source. The PSMDS30 provides a 30mm plasma output and can be supplied with up to 3KW of microwave power. Process pressures: 20 - 5000 Pa.
The PSMDS20 is water cooled (3 l/min), uses a n R26 microwave flange and a DN32KF or DN32CF vacuum port. Gas inlet via Swagelok VCR connector at a maximum rate of 1000 sccm. The aluminum device is 160mm in diameter x 103mm and weighs only 8 kg. |
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