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Model Number: PSPM6000 |
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Product Details: The CoberMuegge PSPM6000 "Plasmodul" plasma system utilizes a modular design to provide the capabilities required for a laboratory device or low scale production.
The Plasmodul downstream package includes the plasma source, process chamber and diagnostic/pumping module ring as well as a gas inlet module upstream and downstream (optional) of the plasma source. The modular design lends itself to customization. |
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